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Analysts: Immersion litho tool lead times growing
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EE Times


SAN FRANCISCO—Lead times for immersion lithography tools are being extended from approximately 9 months to about 12 months or more, thanks to aggressive tool buying by the likes of South Korea's Samsung Electronics Co. Ltd. and Taiwan Semiconductor Manufacturing Co. Ltd., according to analysts at Barclays Capital.

During a series of meetings in Taiwan, Barclays analysts Tim Luke and C.J. Muse were told by representatives of Inotera Memories that the company needs between six and eight immersion tools and that securing the equipment is becoming more difficult, according to a report circulated by Barclays Tuesday (Sept. 1).

Luke and Muse said they anticipate that the total immersion lithography market will consist of roughly 47 tools in 2009 and about 80 tools in 2010.

The fact that lead times are being extended is positive news for ASML, which holds the dominant position in the immersion lithography market, and Cymer Inc., which supplies light sources for ASML tools, the Barclays analysts wrote.



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