MEMS

MEMS integration issues debated
High on the list of obstacles slowing the proliferation of silicon micromachines is the task of integrating the sensors of microelectromechanical systems with signal-conditioning circuitry on the same CMOS chip. When Roger Grace, president of the Micro and Nanotechnology Commercialization Education Foundation and president of Roger Grace Associates (Naples, Fla.), called this phenomenon to our attention, the theme of this InFocus section was established.