Directional kernels as models for fast layout's pattern transfer verification

In this paper we present a methodology that considers common resolution enhancement techniques such as retargeting and sub-resolution assist feature insertion, but the OPC computation and the subsequent contour calculation are replaced by an empirical edge bias function based on an empirically calibrated directional kernel. Because the edge bias function does not provide adequate control over the corner locations a spline-based smoothing process is applied, resulting in a piecewise object similar to those obtained by full lithographic simulations.