Tech Papers
The Use of EUV Lithography to Produce Demonstration Devices
Toshiba America Electronic Components, Mentor Graphics, IBM, AMD, ASML
Bruno La Fontaine et al.Mentor Graphics Technical Library
May 2008
In this paper, we describe the integration of Ultra Violet (EUV) lithography into a standard semiconductor manufacturing flow to produce demonstration devices. 45 nm logic test chips with functional transistors were fabricated using EUV lithography to pattern the first interconnect level (metal 1).
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